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Bellows
Magnetic Fluid Seal
Valve
Heater
Vacuum line
Heating Jacket
IMPLANT PAD
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U-Pad (Slip개선) Image 3
U-Pad (Slip 개선)
P/N : CSU-E17045252
AMAT IMP VIISTA
ON-BOARD® IS 500
ON-BOARD® IS 500
Cryopump Weight 138 lbs
Mounting Flange ISO-K (500 mm)
CTI ON-BOARD® IS 250FE
CTI ON-BOARD® IS 250FE
AND IS 250FX CRYOPUMPS
ON-BOARD® IS 320FX CRYOPUMP
ON-BOARD® IS 320FX CRYOPUMP
(30L & 40L CAPACITY).
12.6 inches (320 mm)
CTI-Cryogenics 8500 8031348G002
Weight 340 lbs
Height 672 mm
Width 540 mm
Length 493 mm
Power 6.75 kW
CTI-Cryogenics 8500 8031348G001
Weight 340 lbs
Height 672 mm
Width 540 mm
Length 493 mm
Power 6.75 kW
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