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U-Pad (Slip개선) Image 3 U-Pad (Slip 개선) P/N : CSU-E17045252 AMAT IMP VIISTA	ON-BOARD® IS 500 ON-BOARD® IS 500 Cryopump Weight 138 lbs Mounting Flange ISO-K (500 mm)	CTI ON-BOARD® IS 250FE CTI ON-BOARD® IS 250FE AND IS 250FX CRYOPUMPS

ON-BOARD® IS 320FX CRYOPUMP ON-BOARD® IS 320FX CRYOPUMP (30L & 40L CAPACITY). 12.6 inches (320 mm)	CTI-Cryogenics 8500 8031348G002 Weight 340 lbs Height 672 mm Width 540 mm Length 493 mm Power 6.75 kW	CTI-Cryogenics 8500 8031348G001 Weight 340 lbs Height 672 mm Width 540 mm Length 493 mm Power 6.75 kW